System and Methods for Wafer Drying

ABSTRACT

In one example, a method for wafer drying includes providing a surface of a first wafer, the surface of the first wafer including a liquid to be removed with a drying process. The method further includes replacing the liquid with a first solid film in a first processing chamber, the first solid film covering the surface of the first wafer. The method further includes transferring the first wafer from the first processing chamber to a second processing chamber. The method further includes processing the first wafer in the second processing chamber by flowing a supercritical fluid through the second processing chamber, where the supercritical fluid removes the first solid film.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No. 16/820,344filed on Mar. 16, 2020, which application is hereby incorporated hereinby reference.

TECHNICAL FIELD

The present invention relates generally to a system and method for waferdrying, and, in particular embodiments, to system and method for waferdrying using supercritical fluids.

BACKGROUND

The manufacturing of semiconductor wafers often involves several processsteps. Many of those processing steps include removal of by-productchemical species used, for example, in a wet cleaning process. Oftendeionized water is used as a final rinse step of a wafer cleaningprocess to remove the cleaning liquids. However, even the rinsing liquidhas to be removed prior to further processing. Therefore, wafers aredried to remove traces of the rinsing liquid. However, with scaling offeatures to ever smaller geometries, drying techniques are beingchallenged to not damage the features during the drying.

To overcome these challenges, one particular method was developed thatinvolved displacing the rinsing liquid on the surface of the wafer withisopropyl alcohol (IPA). This IPA is then removed using a supercriticaldrying process, in which the IPA covered wafer is exposed tosupercritical carbon dioxide, which removes the IPA.

SUMMARY

In accordance with an embodiment of the present invention, a method forwafer drying includes providing a surface of a first wafer, the surfaceof the first wafer including a liquid to be removed with a dryingprocess. The method further includes replacing the liquid with a firstsolid film in a first processing chamber, the first solid film coveringthe surface of the first wafer. The method further includes transferringthe first wafer from the first processing chamber to a second processingchamber. The method further includes processing the first wafer in thesecond processing chamber by flowing a supercritical fluid through thesecond processing chamber, where the supercritical fluid removes thefirst solid film.

A method for wafer drying includes providing a surface of a first wafer,the surface of the first wafer including a liquid to be removed with adrying process; forming a first solid film covering the surface of thefirst wafer in a first processing chamber; flowing a fluid within asecond processing chamber. The method further includes pressurizing thefluid to flow through the second processing chamber in a supercriticalphase; and removing, in the second processing chamber, the first solidfilm from the surface of the first wafer by sublimating the first solidfilm into the supercritical phase of the fluid.

A process equipment includes a processing chamber; a fluid inlet intothe processing chamber; a fluid outlet out of the processing chamber; asupport for holding a wafer to be dried; and control circuit configuredto apply a pressurization cycle to pressurize a fluid in the processingchamber to become a supercritical fluid.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present invention, and theadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawings, in which:

FIGS. 1A-1C illustrate cross-sectional representations of a generalprocess flow for a wafer drying process in accordance with embodimentsof the present invention, wherein FIG. 1A illustrates the formation of asolid film on a substrate after wet processing, wherein FIG. 1Billustrates the transfer of the substrate, and wherein FIG. 1Cillustrates exposing the solid film to a supercritical fluid;

FIGS. 2A-2F show cross-sectional representations of a semiconductorwafer comprising high aspect ratio (HAR) structures during variousstages of drying in accordance with an embodiment of the invention,wherein FIG. 2A illustrates the wafer with a solid film, wherein FIG. 2Billustrates the injection of a fluid into the processing chamber,wherein FIG. 2C illustrates the progressive removal of the solid film inthe fluid, wherein FIG. 2D illustrates a more progressive removal stageof the solid film as it dissolves into the fluid, wherein FIG. 2Eillustrates the complete removal of the solid film, and wherein FIG. 2Fillustrates the wafer after the drying all in accordance with anembodiment of the present invention;

FIG. 3 is a cross-sectional representation of a batch supercriticaldrying process chamber all in accordance with an embodiment of thepresent invention.

FIGS. 4A-4B illustrates a schematic diagram representing variouscomponents of a supercritical drying system described in variousembodiments, wherein FIG. 4A illustrates a system component schematicwhile FIG. 4B illustrates a fluid supply schematic; and

FIG. 5 illustrates a flow chart illustrating a processing procedure fora wafer drying process all in accordance with an embodiment of thepresent invention.

The drawings are not necessarily drawn to scale. The drawings are merelyrepresentations, not intended to portray specific parameters of theinvention. The drawings are intended to depict only specific embodimentsof the inventions, and therefore should not be considered as limiting inscope. In the drawings, like numbering represents like elements.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

The method and using of various embodiments of a wafer drying system arediscussed in detail below. However, it should be valued that the variousembodiments detailed herein may be applicable in a wide variety ofdisciplines. Embodiments may also be applied in other contexts outsideof wafer drying. The specific embodiments described herein are merelyillustrative of specific ways to make and use various embodiments, andshould not be construed in a limited scope.

Conventional methods that used supercritical drying to remove isopropylalcohol (IPA) coated wafer surfaces have many process relatedlimitations. IPA is susceptible to de-wetting and spilling when thewafer is transported to the drying chamber. Additionally, the high vaporpressure of the IPA may result in premature drying, leading to thecollapse of the topographical features on the surface of the wafer.

Embodiments of the present invention overcome these limitations byreplacing drying liquids such as IPA or rinsing liquid such as DI waterwith a solid film that covers the entire surface of the wafer. The solidfilm is then directly removed in a drying chamber by using asupercritical drying process. An embodiment of the method will bedescribed using FIGS. 1A-1C along with FIGS. 2A-2F. An alternativeembodiment of the method and drying chamber will be described using FIG.3 . A system for supercritical wafer drying for implementing theembodiments of FIGS. 1A-1C, 2A-2F, 3 will be described using FIG. 4 .

FIGS. 1A-1C illustrate cross-sectional representations of a generalprocess flow for a wafer drying process in accordance with embodimentsof the present invention.

The embodiments presented herein will elaborate upon a drying techniquein which a wafer 102 is placed into a processing chamber in which asolid film is formed on the surface of the wafer. As will be describedin greater detail later, the solid film serves as a sacrificial layer toprotect the structures on the surface of the wafer 102. Once theformation of the solid film is complete, the wafer 102 is thentransferred to a second processing chamber in which a supercriticalremoval technique is implemented to dissolve away the solid film, thusexposing the top surface structures of the wafer 102.

Prior to the initial stage illustrated in FIG. 1A, the wafer 102 mayhave undergone a wet cleaning process to remove any lingering processchemicals from previous wafer fabrication steps. The wet clean may takeplace in a cleaning process chamber, e.g., in one embodiment may be thefirst processing chamber 101, which can be configured to handle singleor multiple wafers. The cleaning process chamber may operate, forexample, by spin cleaning. While the wafer 102 is spinning, a nozzle armwhich supplies cleaning material may be advanced near the upper side ofthe rotating wafer 102. The nozzle arm may supply, in a predeterminedorder, e.g., a chemical liquid followed by a rinse liquid. The backsideof the wafer 102 may also undergo a similar cleaning process in which achemical liquid, followed by a rinse liquid, is used. For example, inone embodiment of the cleaning process, a SC1 liquid (i.e., a mixture ofammonia hydroxide and hydrogen peroxide), which is an alkaline chemicalliquid, may first be used to remove particles and organic contaminants.Then a rinse operation may be performed using a rinse liquid, such asdeionized water (DIW). A second cleaning process may be performedsequentially in some embodiments. In the next cleaning phase, any nativeoxide film that may be present on the wafer 102 is removed by an aqueoussolution of diluted hydrofluoric acid (DHF), which is an acidic chemicalliquid. Next, an additional rinse cleaning is performed, again with DIW.

Once the wet cleaning process is completed, all the cleaning liquids aredrained from the cleaning process chamber through a drain port, usuallyprovided at a bottom location within the cleaning process chamber.Furthermore, the atmosphere within the cleaning process chamber isexhausted from an exhaust port, e.g., provided at a bottom locationwithin the cleaning process chamber. Meanwhile, the rotation of thewafer holding mechanism 104 is brought to a gradual stop.

After completion of the wet cleaning process described above, the wafer102 has to be dried to remove the rinsing liquids. If the cleaningprocess chamber is configured to perform additional processing steps,the wafer 102 may remain in the same chamber as preparation is made forthe next processing steps. However, in the event the cleaning processchamber is not configured to perform the next processing steps, thewafer 102 may be transferred to a different processing chamber.

Referring now to FIG. 1A, the schematic illustrates the formation of asolid film on the surface of a wafer 102, after wet cleaning andrinsing. At this stage of processing, the wafer 102 is placed into afirst processing chamber 101, where it securely rests upon a waferholding mechanism 104. Within this first processing chamber 101, a solidfilm 103 is formed on the top surface of the wafer 102, such that itcompletely covers the entirety of structures on the surface of the wafer102.

The first processing chamber 101 may be described as a unit that holds awafer 102 substantially horizontal with the wafer holding mechanism 104disposed in an inner chamber that forms a processing space.

The wafer holding mechanism 104 may comprise a rotating chuck thatrotates the wafer 102 around a vertical axis. In other embodiments, thefirst processing chamber 101 may comprise a fixed chuck, a jig withvarious pins or clips used to secure and mount the wafer 102; orpossibly a plate or tray where the wafer 102 may rest during variousprocessing steps.

In various embodiments of the invention, the wafer 102 may comprise asemiconductor substrate, such as silicon. Or in other embodiments, anyother type of semiconductor body, such as silicon on insulator (SOI), aswell as compound semiconductors. Furthermore, the wafer 102 may comprisea semiconductor substrate having multiple processed layers, wherein eachlayer may be comprised of different compositions of semiconductormaterial known within the art. Additionally, the top-most layer of thewafer 102 may comprise surface features, such as high aspect ratio (HAR)structures.

According to embodiments of the invention, the solid film 103 is formedon the top-most surface of the wafer 102 after the wet processing steps.The solid film 103 may be a sacrificial film that provides temporaryphysical support for surface features (i.e., HAR structures) on thewafer 102 during periods of transport from one processing chamber toanother. For example, the rigidity of the solid film 103 coats thesurface features in efforts to help prevent the surface features (i.e.,HAR surfaces) from collapsing upon one another during various modes ofwafer transport.

When a liquid wets a solid, a pressure difference (usually referred asLaplace pressure) builds up across the interface, which depends on thesurface tension and the contact angle between the liquid and solid.During wafer drying (removal of the liquid) from the wafer surface, thisLaplace pressure can build up more in certain regions such as HARstructures causing damage to the features (e.g., pattern collapse).Embodiments of the invention overcome this by avoiding a liquid to vaportransformation as in conventional drying techniques.

Rather, embodiments of the present invention remove the solid film 103by converting (e.g., dissolving or melting) the solid film 103 directlyinto a supercritical fluid. In various embodiments, the material of thesolid film 103 and a fluid are selected such that the solid film 103transforms to a supercritical phase. In other words, in variousembodiments, the composition of the solid film 103 is configured suchthat when the solid film 103 is exposed to a fluid, the solid film 103forms a supercritical fluid, which eliminates the surface tensionbetween the solid film 103 and the underlying structures of the wafer102. This causes the solid film 103 to sublime (or remove) into thefluid, which can then be removed from the process chamber.

Accordingly, in one or more embodiments, the solid film 103 is solublein a supercritical fluid comprising carbon dioxide (scCO₂). In otherwords, in one embodiment, the solid film 103 forms a supercritical phasewith carbon dioxide (CO₂), such that the composition of materials withinthe solid film 103 dissolves into a gas that is miscible with scCO₂. Forexample, the solid film 103 may have a material composition whichcomprises greater than 85% isopropyl alcohol (IPA), since thatconcentration makes the solid film easily soluble in a supercriticalfluid such as scCO₂. In one or more embodiments, the solid film 103 maycomprise polymeric materials, such as polystyrene, polyethylene,polypropylene, and polymers with carbonyl groups.

The solid film 103 may be formed on the surface of the wafer 102 througha multitude of fabrication techniques, such as spin casting, coating,deposition, and other processes known to person having ordinary skill inthe art. For example, the solid film 103 may be initially cast onto thesurface of the wafer 102 through a nozzle that first dispenses thepolymeric material onto a center location of the wafer 102. The wafer102 is then spun, via rotation of the wafer holding mechanism 104coupled within the first processing chamber 101, so as to spread thepolymeric material across the wafer. Once the polymeric material isspread across the wafer 102, a designated spin speed may be implementedto achieve a desired thickness of the solid film 103. The thickness ofthe solid film 103 can range from a few tens of nanometer to a fewmicrons, depending on the height of the surface features (i.e., HARstructures) on the wafer 102.

In various embodiments, the thickness of the solid film 103 may beselected to at least cover the top of the surface features. In one ormore embodiments, the thickness of the solid film 103 is at least 10%more than a thickness of the tallest structure on the wafer 102 so thatall features on the wafer 102 are covered by the solid film 103. Oncethe desired thickness of the solid film 103 is achieved, the polymericmaterial may undergo a soft baking or curing process in order tosolidify and harden the material.

The use of a solid material, such as the solid film 103, in the place ofmore traditional materials (such as liquids, like IPA) used inconventional supercritical drying provides a more mechanically stablematerial for processing. Advantageously, a solid film 103 is much easierto transport at normal robot speeds, in comparison to a traditionalliquid film. For example, in comparison to traditional methods that useliquids, the solid film 103 can be transported at a faster rate therebyreducing latency but at the same time does not pose the risk of spillingfrom (or de-wetting) the surface of the wafer 102. Additionally, due tothe comparatively low vapor pressure of the solid film 103, there is norisk of film loss due to evaporation, as in the case with traditionalmaterials. Consequently, there is no risk of unintended surface exposuredue to drying during ramps in temperature or pressure. Accordingly,embodiments of the present invention can reduce pattern collapse ofsurface features, like HAR structures, especially around the edge of thewafer 102.

As next illustrated in FIG. 1B, the wafer 102 comprising a solid film103 is transported for additional processing. The wafer 102 may betransferred using a wafer delivery apparatus such as a robot coupled toa fork, or a plate that securely holds the wafer 102 in position whileunder transport. For example, the wafer 102 may be delivered to a secondprocessing chamber 105, as further described using FIG. 1C.

Referring next to FIG. 1C, the wafer 102 comprising the solid film 103is placed in the second processing chamber 105, such as a supercriticaldrying (SCD) chamber, where it undergoes a complete removal of the solidfilm 103.

The second processing chamber 105 may be first ramped to the processingcondition. For example, during this time, the wafer 102 as well as thesecond processing chamber 105 may be heated to reach the processingtemperature. Similarly, the second processing chamber 105 may bepressurized to the specific pressure. Advantageously, during this time,the solid film 103 continues to cover the surface of the wafer 102without causing inadvertent exposure of features on the wafer surface.

While in the second processing chamber 105, the solid film 103 on thesurface of the wafer 102 is brought into contact with a supercriticalfluid, which in one embodiment may comprise carbon dioxide (scCO₂). Thefluid is injected into the second processing chamber 105 and pressurizedto become a supercritical fluid, which then makes contact with the solidfilm 103 on the surface of the wafer 102. While in the presence of thesupercritical fluid, the solid film 103 gradually dissolves away,leaving the wafer 102 “dried” and the newly-exposed surface features(i.e., HAR structures) ready for additional processing.

In one embodiment, the supercritical fluid predominately comprisessupercritical carbon dioxide (scCO₂), which advantageously has goodchemically stability, reliability, low cost, non-toxic, non-flammable,and easily available. All of these characteristics help make scCO₂ adesirable candidate for various semiconductor manufacturing processes,in particular wafer drying.

Within the second processing chamber 105, a fluid supply header deliversthe supercritical fluid to the main body of the second processingchamber 105 through the inlet 111. During processing (i.e., removal ofthe solid film 103), the fluid supply header delivers the supercriticalfluid at a controlled, e.g., laminar flow rate. While operating at alaminar flow rate, the supercritical fluid may flow directly from thefluid supply header toward the top surface of the solid film 103. On itsjourney down towards the surface of the wafer 102, the supercriticalfluid penetrates through the solid film 103, gradually removing it inthe process. Details of this process will be described in a latersection.

At the completion of processing, a fluid discharge header guides thesupercritical fluid from the main body of the second processing chamber105 to a region outside of the main body through outlet 112. In thisoutside region, the supercritical fluid is discharged from the secondprocessing chamber 105. The discharged supercritical fluid may alsocomprise remnants of the dissolved solid film 103.

FIGS. 2A-2F show cross-sectional representations of a drying processflow as a solid film 103 is removed from the surface of a wafer 102comprising high aspect ratio (HAR) structures 201 in accordance with anembodiment of the invention. The following figures offer a more detailedaccount of the various wafer-level process stages that may take placewithin the second processing chamber 105 described in FIG. 1C above.

Referring now to FIG. 2A, at this stage of processing, a wafer 102comprising HAR structures 201 is surrounded by a solid film 103. Asdescribed earlier, the solid film 103 may be a sacrificial layer thatoffers temporary protection to surface features, such as the HARstructures 201 depicted in FIG. 2A. The solid film 103 helps ensure theHAR structures 201 do not succumb to pattern collapse, primarily seenaround the edges of the wafer 102 during transport after a wet cleaningprocess.

According to embodiments of the invention, depending on the desiredapplication, the aspect ratio (width to height) of the HAR structures201, in one example, may range from 1:5 to 1:20, or 1:5 to 1:100. It isnoted that embodiments of this application apply to aspect ratios notspecifically addressed herein.

In embodiments of the invention, the HAR structures 201 may be part of apattern of a device being fabricated or an intermediate structure duringfabrication. In various embodiments, the HAR structures 201 may befabricated through standard semiconductor manufacturing techniques suchas deep reactive ion etching (DRIE) or other processes known to personshaving ordinary skill in the art.

The HAR structures 201 may comprise patterns of materials such assilicon, silicon carbide, gallium nitride, silicon oxide, siliconnitride, metal lines or vias, metal oxides (MOx), metal nitrides (MNx),and metal oxynitrides, where the “M” represents an elemental metal suchas aluminum, copper, hafnium, titanium, tantalum, tungsten, molybdenum,and others.

As next illustrated in FIG. 2B, a fluid 203 is introduced into thepressure sealed second processing chamber 105, under a laminar flowrate, where it is able to reach a supercritical phase due to set processparameters of the system (e.g., pressure and temperature). As the fluid203 penetrates into the solid film 103, a mixture 202 is formed at theinterface between the fluid 203 and top portion of the solid film 103.The mixture 202 comprises the fluid 203 and the solid film 103.

In various embodiments, the solid film 103 is removable by the fluid 203and soluble in the fluid 203. In one embodiment, the mixture 202 alsoforms a supercritical phase and therefore separates out from the solidfilm 103 and is incorporated into the flowing fluid 203. In anotherembodiment, the solid film 103 dissolves or sublimates in the fluid 203and thus directly transitions into a gaseous phase. For example, if thesolid film 103 comprises a polymeric substance that is miscible in thefluid 203, then the fluid 203 can be used to dissolve the polymericsubstance away until it is fully removed from the surface of the wafer102. In a different embodiment, the solid film 103 melts into the fluid203 and is removed by the fluid 203. In another example, the fluid 203may be used to saturate the polymeric substance similar to a solvent.

Advantageously, during the removal of the solid film 103, the stressesfrom surface tension between the mixture 202 and the underlying HARstructures 201 is minimal causing no damage to these structures.

FIG. 2C shows the progressive removal of the solid film 103 as itdissolves into the fluid 203. As the solid film 103 depletes, themixture 202 penetrates deeper into the solid film 103. The mixture 202comprises a combination of material from the dissolving solid film 103as well as the fluid 203.

Referring next to FIG. 2D, the schematic shows a more progressiveremoval stage of the solid film 103 as it continues to dissolve into thefluid 203. At this stage, the second processing chamber 105, shown aboveand discussed in FIG. 1C, is predominately filled with the fluid 203.Additionally, the majority of the solid film 103 has been removed as itis consumed by the fluid 203. Moreover, the mixture 202 has penetratedfurther past the HAR structures 201 and deeper into the solid film 103.

As shown in FIG. 2E, the solid film 103 is completely removed. As theschematic shows, the fluid 203, which has fully encompassed the secondprocessing chamber 105, is completely surrounding the HAR structures201. Subsequently, the solid film 103 is no longer present on thesurface of the wafer 102. Likewise, the mixture 202 is also flushed outalong with the flowing fluid 203.

FIG. 2F shows a schematic of the wafer 102, comprising the HARstructures 201, once the fluid 203 is purged from the second processingchamber 105 (e.g., supercritical drying chamber). With the secondprocessing chamber 105 now purged of any lingering gases, the HARstructures 201 are exposed and ready for subsequent processing. At thisfinal stage, the wafer 102 is removed from the second processing chamber105 after depressurizing the chamber and stopping the flow of the fluid203 and the wafer 102 may undergo subsequent processing as inconventional semiconductor processing.

The total processing time of a wafer 102 in the second processingchamber 105 may range anywhere from roughly 70-180 seconds. This timescale may be dependent upon the type of material comprising the solidfilm 103. Likewise, the time scale may also need to be adjusted basedupon the desired thickness needed for the solid film 103 to fully coverall of the HAR structures 201 present on the surface of the wafer 102.Moreover, the solid film 103 may require more time to equilibrate withinthe second processing chamber 105 before the fluid 203 is delivered intothe system.

FIG. 3 is a cross-sectional representation of a higher throughput batchprocessing chamber 305 for supercritical drying in accordance withanother embodiment of the invention.

In this embodiment of the invention, the batch processing chamber 305 isconfigured to process multiple wafers 102. By processing multiple wafers102, total processing time per wafer can be reduced significantly,thereby reducing production costs. For example, in the illustration, thebatch processing chamber 305 is configured to support two wafers at thesame time, and therefore increases the throughput by two times. However,the batch processing chamber 305 includes modifications over thepreviously illustrated second processing chamber 105 for supportingmultiple wafers.

In various embodiments, the batch processing chamber 305 is equippedwith a modified mechanically handling system that may comprise multiplewafer holding mechanisms 104. Furthermore, the wafer holding mechanisms104 are designed to reduce wafer to wafer variations and therefore allof the wafers 102 experience an identical process environment, forexample, similar flow rate, partial pressures of the fluid 203 at thewafer surface, and others. In one embodiment, the batch processingchamber 305 is larger than the second processing chamber 105 andtherefore may take longer for stabilization (pressurization). If thebatch processing chamber 305 is too much larger, then any advantagegained by simultaneous processing may be negated by the pressurizationand depressurization times.

FIGS. 4A-4B illustrates a schematic diagram representing variouscomponents of a supercritical drying system such as the secondprocessing chamber 105/batch processing chamber 305 described in variousembodiments, wherein FIG. 4A illustrates a system component schematicwhile FIG. 4B illustrates a fluid supply schematic.

In various embodiments of the invention, the supercritical drying systemmay comprise an interface circuit 401 coupled to the second processingchamber 105 (or batch processing chamber 305). The interface circuit 401may comprise a temperature controller 402 for controlling thetemperature of the wafer within the second processing chamber 105. Inembodiments of the invention, the temperature controller 402 may be usedto allow the user to select a desired temperature for the intendedprocess. The system may include a timing controller 403 for controllingthe time spent by the wafer within the processing chamber. The timingcontroller 403 may also control timing cycles for pressurization andtemperature cycles. In various embodiments of the invention, the timingcontroller 403 may also be used to allow the user to set and/or monitora desired time for the intended process.

The system may also include a pressure controller 406 to monitor thepressure within the chamber, which may be used by the timing controller403 and the temperature controller 402 to adjust the pressure and/ortemperature within the chamber. In some embodiments, the circuitry ofthe temperature controller 402, the timing controller 403 and thepressure controller 406 may be integrated in a single chip. A powercontroller 404 either singly or in conjunction with the timingcontroller 403 may supply power to the various components of the system.A power switch 405 may provide manual override ability.

In embodiments of the invention, the interface circuit 401 may alsocomprise a display and a graphical user interface (GUI), such as adigital display touch screen for user input for various process-relatedfunctions performed by the second processing chamber 105. The displaymay also provide status indicators related to each process performed bythe second processing chamber 105. This would allow the user to monitorthe real-time status of the set process parameters.

In embodiments of the invention, the power switch 405 allows the user toturn on or off (i.e., power down) the second processing chamber 105. Thepower switch 405 may also include an indicator that may allow the userto determine whether the system is in an operational mode, stand-bymode, turned off mode, or other modes.

In other embodiments of the second processing chamber 105, theadditional coupled components may comprise a vent/fan unit 416, a fluidinlet system 408, a fluid outlet system 409, and a wafer transportsystem 414, which may include the wafer holding mechanism 104 (describedabove).

In various embodiments, the vent/fan unit 416, which may be comprisedwithin the second processing chamber 105, may help evacuate gases fromthe main compartment of the second processing chamber 105 or to helpregulate the internal temperature, e.g., by avoiding hot spots oroverheating. The vent/fan unit 416 may be located at the back or bottomof the second processing chamber 105 in one embodiment.

In various embodiments of the invention, the fluid inlet system 408 andthe fluid outlet system 409, coupled to the second processing chamber105, offer a pathway for the gases such as carbon dioxide to enter andleave the main compartment of the second processing chamber 105.

As illustrated in FIG. 4B, the fluid inlet system 408 may comprise afluid supply source 450 for supplying the raw material of the fluid 203at a pressure higher than the atmospheric pressure into the secondprocessing chamber 105, a fluid supply passage 460 connecting the fluidsupply source to the second processing chamber 105. The fluid inletsystem 408 may also comprise a flow control unit with an on-off valve421 disposed in the fluid supply path. The on-off valve 421 adjusts theon and off of the supply of the fluid 203 (e.g., in a supercriticalstate) from the fluid supply source 450, and causes the fluid 203 toflow onto the second processing chamber 105 when the on-off valve 421 isopen and does not cause the fluid 203 to flow onto the second processingchamber 105 when the on-off valve 421 is closed. For example, when theon-off valve 421 is open, the fluid 203 having a high pressure of about15 MPa to 30 MPa may be supplied from the fluid supply source 450 to thesupply line via the on-off valve 421.

The fluid inlet system 408 may also comprise heaters 422 for heating thefluid 203. The fluid inlet system 408 may also comprise a plurality ofsensors 423 for sensing the temperature and pressure. The fluid inletsystem 408 may also comprise a pressure reducing valve, e.g., an orifice424 for regulating the pressure of the fluid 203 (e.g., in asupercritical state) being supplied from the fluid supply source 450.The fluid inlet system 408 may also comprise a filter 425 to remove anyforeign matter contained in the fluid 203 (e.g., in a supercriticalstate) being sent from the orifice 424 and output a clean fluid 203(e.g., in a supercritical state) into inlet 111 of the second processingchamber 105.

The fluid outlet system 409 may comprise a discharge control valve 431that adjusts the on and off of the supply of the fluid 203 from thesecond processing chamber 105, and causes the fluid 203 to dischargefrom the second processing chamber 105 when the discharge control valve431 is open and does not cause the fluid 203 to discharge from thesecond processing chamber 105 when the discharge control valve 431 isclosed.

The fluid outlet system 409 may also comprise a plurality of sensors 433for sensing the temperature and pressure of the fluid being dischargedthrough the downstream discharge path 470. The fluid outlet system 409may also comprise a pressure reducing valve, e.g., an orifice 434 forregulating the pressure of the fluid 203 being discharged from thesecond processing chamber 105. In various embodiments, the fluid inletsystem 408 and the fluid outlet system 409 may be controlled by theinterface circuit 401 using the components described using FIG. 4A. Invarious embodiments, the fluid inlet system 408 and the fluid outletsystem 409 may comprise other components as known to a person havingordinary skill in the art. In one embodiment, inlets for the fluid inletsystem 408 and outlets for the fluid outlet system 409 may be located atthe bottom, or near the back, of the second processing chamber 105.

FIG. 5 illustrates a flow chart illustrating a processing procedure fora wafer drying process by removing a liquid to be removed by forming asolid film all in accordance with an embodiment of the presentinvention.

Accordingly, as illustrated for example in FIGS. 1A-1C and 2A-2F above,a method for wafer drying comprises providing a surface of a wafer 102,where the surface of the wafer comprises a liquid to be removed with adrying process (step 510). In a first processing chamber 101, the methodincludes replacing the liquid to be removed with a first solid film 103,where the first solid film 103 covers the surface of the wafer 102 (step520). The method further includes transferring the wafer 102 from thefirst processing chamber 101 to a second processing chamber 105 (step530). The method may further include processing the wafer 102 in thesecond processing chamber 105 by flowing a fluid 203 through the secondprocessing chamber 105 (step 540), wherein the fluid 203 removes thefirst solid film 103.

Example embodiments of the invention are summarized here. Otherembodiments can also be understood from the entirety of thespecification as well as the claims filed herein.

Example 1. A method for wafer drying includes providing a surface of afirst wafer, the surface of the first wafer including a liquid to beremoved with a drying process. The method further includes replacing theliquid with a first solid film in a first processing chamber, the firstsolid film covering the surface of the first wafer. The method furtherincludes transferring the first wafer from the first processing chamberto a second processing chamber. The method further includes processingthe first wafer in the second processing chamber by flowing asupercritical fluid through the second processing chamber, where thesupercritical fluid removes the first solid film.

Example 2. The method of example 1, further including: before replacingthe liquid with the first solid film, performing a rinsing process on aplurality of features disposed at the surface of the wafer.

Example 3. The method of one of examples 1 or 2, where the liquid to beremoved is a rinsing liquid from the rinsing process.

Example 4. The method of one of examples 1 to 3, further includingremoving a rinsing liquid from the rinsing process by treating the waferwith isopropyl alcohol, where the liquid to be removed is the isopropylalcohol.

Example 5. The method of one of examples 1 to 4, where the surface ofthe wafer includes high aspect ratio features.

Example 6. The method of one of examples 1 to 5, where the first solidfilm surrounds and covers the high aspect ratio features.

Example 7. The method of one of examples 1 to 6, further including:providing a surface of a second wafer, the surface of the second waferincluding the liquid to be removed with the drying process; in the firstprocessing chamber, replacing the liquid with a second solid film, thesecond solid film covering the surface of the second wafer. The methodfurther includes transferring the second wafer from the first processingchamber to a second processing chamber; and processing the second waferin the second processing chamber by flowing a supercritical fluidthrough the second processing chamber, where the supercritical fluidremoves the second solid film.

Example 8. The method of one of examples 1 to 7, where the first waferand the second wafer are simultaneously processed in the secondprocessing chamber.

Example 9. A method for wafer drying includes providing a surface of afirst wafer, the surface of the first wafer including a liquid to beremoved with a drying process; forming a first solid film covering thesurface of the first wafer in a first processing chamber; flowing afluid within a second processing chamber. The method further includespressurizing the fluid to flow through the second processing chamber ina supercritical phase; and removing, in the second processing chamber,the first solid film from the surface of the first wafer by sublimatingthe first solid film into the supercritical phase of the fluid.

Example 10. The method of example 9, further including: before formingthe first solid film, performing a rinsing process step on a pluralityof features disposed at the surface of the first wafer.

Example 11. The method of one of examples 9 or 10, where the liquid tobe removed is a rinsing liquid from the rinsing process.

Example 12. The method of one of examples 9 to 11, further includingremoving a rinsing liquid from the rinsing process by treating the waferwith isopropyl alcohol, where the liquid to be removed is the isopropylalcohol.

Example 13. The method of one of examples 9 to 12, where the surface ofthe first wafer includes high aspect ratio features.

Example 14. The method of one of examples 9 to 13, where the first solidfilm surrounds and covers the high aspect ratio features.

Example 15. The method of one of examples 9 to 14, further including:providing a surface of a second wafer to be dried; forming a secondsolid film covering the surface of the second wafer in the firstprocessing chamber. The method further includes removing the secondsolid film from the surface of the second wafer by sublimating thesecond solid film into the supercritical phase of the fluid.

Example 16. The method of one of examples 9 to 15, where the first waferand the second wafer are simultaneously processed in the secondprocessing chamber.

Example 17. The method of one of examples 9 to 16, further including:processing the surface of the first wafer with a liquid before formingthe first solid film, where forming the first solid film replaces theliquid with the first solid film.

Example 18. A process equipment includes a processing chamber; a fluidinlet into the processing chamber; a fluid outlet out of the processingchamber; a support for holding a wafer to be dried; and control circuitconfigured to apply a pressurization cycle to pressurize a fluid in theprocessing chamber to become a supercritical fluid.

Example 19. The process equipment of example 18, where the controlcircuit includes: a temperature controller to monitor and control thetemperature of the fluid; and a pressure controller to monitor andcontrol the pressure of the fluid.

Example 20. The process equipment of one of examples 18 or 19, where thesupport is configured to hold a plurality of wafers, where the controlcircuit is configured to provide an identical process environment toeach of the plurality of wafers during the pressurization cycle.

While this invention has been described with reference to illustrativeembodiments, this description is not intended to be construed in alimiting sense. Various modifications and combinations of theillustrative embodiments, as well as other embodiments of the invention,will be apparent to persons skilled in the art upon reference to thedescription. It is therefore intended that the appended claims encompassany such modifications or embodiments.

What is claimed is:
 1. A process equipment for supercritical dryingcomprising: a processing chamber; a fluid inlet into the processingchamber; a fluid outlet out of the processing chamber; a support forholding a wafer to be dried; and control circuit configured to apply apressurization cycle to pressurize a fluid in the processing chamber tobecome a supercritical fluid.
 2. The process equipment of claim 1,wherein the control circuit is configured to depressurize the processingchamber and stop the flow of the fluid into the processing chamber. 3.The process equipment of claim 1, wherein the processing chamber isconfigured to replace a liquid to be removed from the wafer with a solidfilm, and wherein the control circuit is configured to remove the solidfilm by applying the pressurization cycle.
 4. The process equipment ofclaim 1, wherein the control circuit comprises: a temperature controllerconfigured to monitor and control the temperature of the fluid; apressure controller configured to monitor and control the pressure ofthe fluid; and a timing controller configured to control time spent bythe wafer within the processing chamber.
 5. The process equipment ofclaim 4, wherein the temperature controller, the timing controller, andthe pressure controller are integrated in a single chip.
 6. The processequipment of claim 1, wherein the support is configured tosimultaneously hold a plurality of wafers, wherein the control circuitis configured to provide an identical process environment to each of theplurality of wafers during the pressurization cycle.
 7. The processequipment of claim 1, further comprising a wafer transport systemconfigured to transport and hold the wafer within the processingchamber.
 8. The process equipment of claim 1, further comprising a ventfan configured to evacuate gases from the processing chamber andregulate the temperature within the processing chamber.
 9. The processequipment of claim 8, wherein the vent fan is located at the bottom ofthe processing chamber.
 10. The process equipment of claim 1, furthercomprising: a fluid inlet system comprising a fluid supply sourceconfigured to supply the fluid at a pressure higher than atmosphericpressure into the processing chamber; and a fluid supply path connectingthe fluid supply source to the processing chamber, wherein the fluidinlet system comprises a flow control unit with an on-off valve disposedin the fluid supply path.
 11. The process equipment of claim 10, whereinthe fluid inlet system comprises heaters configured to heat the fluidbeing dispensed through the fluid supply path.
 12. The process equipmentof claim 10, wherein the fluid inlet system comprises a plurality ofsensors configured to sense temperature and pressure of the fluid beingdispensed through the fluid supply path.
 13. The process equipment ofclaim 10, wherein the fluid inlet system comprises an orifice configuredto regulate the pressure of the fluid being supplied from the fluidsupply source, wherein the fluid inlet system comprises a filter toremove foreign matter contained in the fluid being sent from theorifice.
 14. The process equipment of claim 10, further comprising: afluid outlet system for discharging the fluid from the processingchamber; and a downstream discharge path connecting the processingchamber to downstream components, wherein the fluid outlet systemcomprises a discharge control valve configured to adjust the on and offof the discharge of the fluid from the processing chamber.
 15. Theprocess equipment of claim 14, wherein the fluid outlet system comprisesa plurality of sensors configured to sense temperature and pressure ofthe fluid being discharged from the processing chamber through thedownstream discharge path.
 16. The process equipment of claim 14,wherein the fluid outlet system comprises a pressure reducing valveconfigured to regulate the pressure of the fluid being discharged fromthe processing chamber.
 17. A process equipment for supercritical dryingcomprising: a processing chamber; a mechanical handling systemconfigured to simultaneously support a plurality of wafers within theprocessing chamber; a fluid inlet into the processing chamber; a fluidoutlet out of the processing chamber; and interface circuit configuredto apply a pressurization cycle to pressurize a fluid in the processingchamber to become a supercritical fluid.
 18. The process equipment ofclaim 17, further comprising: a vent fan to evacuate gases from theprocessing chamber and regulate the temperature within the processingchamber; a fluid outlet system for discharging the fluid from theprocessing chamber; a downstream discharge path connecting theprocessing chamber to downstream components; a fluid outlet system fordischarging the fluid from the processing chamber; and a downstreamdischarge path connecting the processing chamber to downstreamcomponents, wherein the interface circuit comprises a temperaturecontroller configured to monitor and control the temperature of thefluid, a pressure controller configured to monitor and control thepressure of the fluid, a timing controller configured to control timespent by the plurality of wafers within the processing chamber, and apower controller configured to supply power to the system.
 19. A systemcomprising: a first processing chamber; a nozzle to dispense a polymericmaterial onto a center location of a wafer; a wafer holding mechanismconfigured to rotate the wafer while dispensing the polymeric material,the first processing chamber being configured to perform a soft bakingor curing process to convert the polymeric material to a solid film; asecond processing chamber; a transport system configured to roboticallytransport the wafer from the first processing chamber to the secondprocessing chamber; a mechanical handling system configured to supportthe wafer within the second processing chamber; a fluid inlet into thesecond processing chamber; a fluid outlet out of the second processingchamber; and interface circuit configured to apply a pressurizationcycle, the pressurization cycle configured to pressurize a fluid in thesecond processing chamber to become a supercritical fluid, purge thesupercritical fluid completely from the second processing chamber, andremove the wafer from the second processing chamber after depressurizingthe second processing chamber and stopping the flow of the supercriticalfluid to the second processing chamber.
 20. The system of claim 19,wherein the first processing chamber is configured to perform wetcleaning of a surface of the wafer prior to dispensing a polymericmaterial.